The European Chemicals Agency and the European Semiconductor Industry
Association (ESIA) have together developed three practical examples of Exposure
The examples illustrate what the exposure scenarios, which are part of the
Chemical Safety Reports, of suppliers of chemical substances sold to the
semiconductor industry could look like. The project demonstrated that the
exchange of information between substance manufacturers and downstream users
facilitates a common understanding of the conditions of safe use, and hence is
the key for a good exposure scenario.
The examples relate to the industrial manufacture of semiconductor devices
('microchips') in areas called 'clean rooms' in which the temperature, humidity
and airborne particle contamination are strictly controlled. Based on three
substance examples and their uses, the exposure scenario describes the
conditions of safe use in clean rooms. The related exposure estimation was
carried out with standard Tier 1 models. The examples demonstrated that risk of
hazardous substances can be adequately controlled.
The International Sematech Manufacturing Initiative (ISMI), an international
consortium of semiconductor manufacturers, and semiconductor chemical suppliers
also contributed to the project.
AplusA-online.de - Source: European Chemicals Agency